[DEFINITION]
integrated MEMS device, in which complementary metal–oxide–semiconductor
(CMOS) signal-processing circuits and MEMS elements are formed on the same
silicon substrate.(IEC/2015)
CMOS MEMS is one form of the MEMS device that integrates CMOS signal-processing circuits and MEMS elements. Usually, the CMOS MEMS is fabricated by performing a MEMS process on the CMOS preformed wafer, and therefore it is necessary that the MEMS process does not damage the CMOS circuit.