Flow sensor
0303111-64
[DEFINITION]
A sensor for measuring the flow rate of fluid.
[DESCRIPTION]
Micromachining technology has realized a device for measuring the
micro-flow of gases or liquids. To measure the flow of gases, a hot-wire flowmeter was realized by
using the temperature change of the heater caused by changes in the flow. To measure the flow of
liquids, a differential pressure-type flowmeter is used; the pressure drop at a micro-orifice is
detected by a piezoelectric pressure sensor on a silicon diaphragm prepared by micromachining
technology.
[References]
(4)
[Related Terms]
Microsensor, Diaphram structure