Ion beam-assisted machining

0603101-80

[DEFINITION]
An ion beam machining that introduces etching gas to assist the processing.

[DESCRIPTION]
Ion beam machining uses a physical action (sputtering) produced by the kinetic energy of the ions of inert gas. In some cases, there are problems such as a slow removal rate or surface damage of the sample. Ion beam-assisted machining solves these problems by introducing active gas for etching into the reaction chamber to add etching action based on a chemical reaction.

[References]
(1)(7)(8)

[Related Terms]
Ion beam machining