Laser-assisted etching
0604101-87
[DEFINITION]
An etching process that uses a laser beam to both thermally activate
the material and excite an etchant.
[DESCRIPTION]
As laser-assisted etching uses a laser as an excitation beam to
activate a photochemical reaction, the high power required in general laser (thermal) machining is
not necessary. The concentration of ions or plasma increases locally and the temperature of the
material rises, increasing the reaction rate in the etching process. Laser-assisted etching is also
generally suitable for hard-to-process materials like ceramics. This process is seen as a combined
process of maskless patterning by laser and high-precision etching.
[References]
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[Related Terms]