laser dicing

[DEFINITION]
wafer cutting technology using a laser light that is irradiated and scanned along dicing lines on a substrate.(IEC/2015)



[DESCRIPTION]

In a cutting process where blade dicing is difficult to use, the laser dicing method is widely used where a laser light is focused inside the substrate and modified layers are formed beneath the scribe lines, and finally the wafer is diced by a mechanical expansion.



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[Related Terms]