Micro-structure
0000101-128
[DEFINITION]
A generic term for microscopic structure that constructs microscopic
objects such as microscopic sensors, actuators, gear train, link structures, and turbines.
[DESCRIPTION]
Microscopic sensors, actuators, gear train, link mechanisms, and turbines
have been experimentally produced by IC fabrication process and by the
LIGA (Lithographie-Galvanoformung-Abformung) process. These experimental
products are the origin of micromachine-technology and have stimulated
the development of today's micromachine research. Currently, much R&D
is being carried out into production technologies of three-dimensional
micro-structures with a high aspect ratio.
[References]
(6)
[Related Terms]
LIGA process