Micromechano-optics
0108101-139
[DEFINITION]
Engineering relating to optical devices integrating optical
waveguides and other optical components on the same substrate and incorporating mechanical
components.
[DESCRIPTION]
By combining actuators and mirrors, etc., light can be deflected to
a far greater degree than with electro-optical or acoustic-optical effect methods. As one example,
a Fabry-Perot interferometer that electri-cally changes the transmitted wavelength by
electrostatically changing the spacing of reflecting mirrors has beeen manufactured on a silicon
substrate. Four drive electrodes and four space detecting electrodes are used to move in parallel
the silicon reflecting mirrors to the required spacing. This inter-ferometer is used for light with
a wavelength of around 1.5 μm. Another example is the application to optical scanners, including a
laser printer head and a torsion mirror. Research is also focusing on devices known as
micromechanical optical IC sensors that have moving parts within optical integrated devices and
optically measure mechanical quantity.
[References]
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[Related Terms]