Microsensor

0303001-126

[DEFINITION]
A generic term for devices that measure the physical or chemical quantitiy, and are produced by micromachining.

[DESCRIPTION]
In micromachines, the first field to be developed and realized is that of the micro-sensor. Microsensors include mechanical quantity sen-sors (measuring pressure, acceleration, tactile senses, displacement, etc.), chemical quantity sensors (measuring ions, oxygen, etc.), electrical quantity sensors (measuring magnetism, current, etc.), biosensors, and optical sensors. In many micro-sensors, the detecting section containing the mechanism is integrated with the electronic circuits. The advantages of micro-sensors are: 1) less environmental disruption, 2) the ability to measure local states of small areas, 3) integration with circuits, and 4) less operating power.

[References]
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[Related Terms]
Smart sensor