Resonator
0102202-179
[DEFINITION]
A device that resonates near the natural frequency for specific
purposes.
[DESCRIPTION]
The resonator here is a device in which an oscillator formed by
silicon micromachining technology is resonated by electrostatic force or electromagnetic force and
so on. Physical properties such as stress in the oscillator vary by subtle changes of the ambient
environment such as temperature, pressure, and concentration , which cause change of the resonant
frequency. For the high sensitivity, resonators are used for various vibration sensors. For
example, the infrared sensor exploits the changes of resonant frequency by relaxation of stress of
the oscillator when it absorbs infrared rays and undergoes thermal expansion, while the pressure
sensor exploits the changes in resonant frequency caused by the strain of the oscillator under
pressure.
[References]
(2)(4)(47)
[Related Terms]
Vibration sensor, Pressure sensor