Vacuum microelectronics device
0399221-213
[DEFINITION]
A device that has the same functions (rectification, amplification,
oscillation) as a vacuum tube based on the production of a microscopic cathode by silicon
micromachining technology.
[DESCRIPTION]
A microscopic pointed needle is produced by either vacuum
deposition using a pin-hole mask, or silicon anisotropic etching, the needle being used as a
microscopic field emission cold cathode. Field emission is a phenomenon in which a high electric
field is applied to make electrons fly from the tip of the needle. Vacuum microelectronics devices
compensate for the shortcomings of former vacuum tubes (large size and high calorific values) and
offer characteristics such as a high charge transfer speed, withstanding voltage properties, heat
resistance, and radiation resistance, which are lacking in semiconductor elements. Research and
development is being carried out into such fields as flat panel cathode ray tubes with a large
number of such cathodes, and into surface analyzers and vacuum gauges.
[References]
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[Related Terms]