| 目 次 |
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| 序 |
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| 第１章 緒言 |
1 |
|
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| 1-1. はじめに |
1 |
| 1-2. 委員会構成 |
2 |
| 1-3. 調査方法 |
3 |
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| 第２章 分野別研究動向Review |
|
| （MEMS２００１～MEMS２００６の研究動向推移） |
6 |
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| 2-1. Fundamentals |
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| 2-1-1. Fabrication Technologies (Silicon) |
9 |
| 2-1-2. Fabrication Technologies (Non-Silicon) |
11 |
| 2-1-3. Packaging Technologies |
14 |
| 2-1-4. Actuators (Electrostatic,
Piezoelectric,..etc.) |
17 |
| 2-1-5. Actuators (Electromagnetic, Magnetic) |
20 |
| 2-1-6. Design and Modeling |
23 |
| 2-1-7. Material |
25 |
|
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| 2-2. Applied Devices/Systems |
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| 2-2-1. Physical (Sensors) |
27 |
| 2-2-2. Fluidic |
32 |
| 2-2-3. Medical |
35 |
| 2-2-4. Biological |
37 |
| 2-2-5. Optical (Optical switch, etc.) |
40 |
| 2-2-6. Chemical |
42 |
| 2-2-7. Robotics System and Control |
45 |
| 2-2-8. RF-MEMS |
48 |
| 2-2-9. Power-MEMS |
51 |
| 2-2-10. Others (SPM, ... etc.) |
55 |
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| 2-3. Others |
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| 2-3-1. Others |
59 |
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| 第３章 技術分類の見直しについて |
62 |
| 第４章 平成18年度下期分野別動向調査結果 |
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| （MEMS2007発表分類調査、分野別動向調査） |
64 |
| 4-1. Fundamentals |
|
| 4-1-1. Fabrication Technologies (Silicon) |
73 |
| 4-1-2. Fabrication Technologies (Non-Silicon) |
75 |
| 4-1-3. Packaging Technologies |
78 |
| 4-1-4. Actuators |
82 |
| 4-1-5. Design and Modeling |
85 |
| 4-1-6. Material |
87 |
| 4-1-7. Others |
89 |
|
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| 4-2. Applied Devices/Systems |
|
| 4-2-1. Mechanical Physical |
91 |
| 4-2-2. Radiation/Material Substance Sensor |
94 |
| 4-2-3. Fluidic |
96 |
| 4-2-4. Biomacromolecules |
98 |
| 4-2-5. Cells & Subcellular components |
101 |
| 4-2-6. Tissue/Organ/Body & Medical
Applications |
103 |
| 4-2-7. Optical |
106 |
| 4-2-8. RF-MEMS |
108 |
| 4-2-9. Power-MEMS |
111 |
| 4-2-10. Others (SPM, Robotics System and Control...
etc.) |
115 |
|
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| 4-3. Others |
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| 4-3-1. Others |
118 |