|  | 
  
    
      | 
        
          
            |  |  
            | 
 
              
                
                  | 8th Micromachine Summit 
 Apil 30 - may 3, 2002
 Maastricht, The Netherlands
 
 
 
                    
                      
                        | Organised jointly by - MESA+ Research Institute (Netherlands)
 - IMEC (Belgium)
 |  |  
 
 |  |  
      |  | 
 
 |  
      | 
 
 |  
  
    
      |  |  
      |  |  
      |  |  
      | 
        
          
            | Australia
 
 Ian Bates, Professor
 Rmit University
 
 Jason Chaffey
 Rmit University
 
 
 Belgium
 
 Kris Baert
 IMEC Microsystems, Components & Pack.Division
 
 Dirk Beernaert
 European Commission Essential Inf. Society Techn. & Infrastr
 
 Borghs
 IMEC MCP
 
 Charles Peng
 Science Division, Taipei Representative Office in belgium
 
 Hocine Ziad
 Alcatel Microelectronics Technology R&D
 
 
 Canada
 
 Dan Gale
 Canadian Microelctronics Corporation
 
 Thomas Jackman
 National Research Council of Canada
 
 David Klymyshyn, Professor
 University of Saskatchewan Dept. of Electrical Engineering
 
 
 China
 
 Bingchu Cai, Professor
 Shanghai Jiao Tong University
 
 Henggao Ding, Professor
 Chinese Society of Inertial Technology
 
 Jinshan Wang
 Chongqing MEMS Science &Techn. Co,ltd.
 
 Xiaohao Wang, Ass.Prof.
 Tsinghua University Dept. of Precision Instr. & Mechanology
 
 Zuwu Yuan, Dr.
 Chinese Society of Inertial Technology
 
 Wendong Zhang, Professor
 North China Institute of Technology
 
 Zhaoying Zhou, Professor
 Tsinghua University Micro/Nano Technology Research Center
 
 
 Denmark
 
 Anders Larsen
 Technical University of Denmark MIC
 
 
 Finland
 
 Sami Franssila, Dr.
 Helsinki University of Technology Microelectronics Centre
 
 
 France
 
 Constant Axelrad
 CEA-LETI
 
 Emmanuel Bigler, Professor
 ENSMM-Besancon-France LCEP
 
 Jean Christophe Eloy
 Yole Developpement
 
 Gaitan Menozzi
 MEMSCAP
 
 
 Germany
 
 Liang-Han Hsieh
 ITRI Western Europe Office
 
 Jan Korvink, Dr.
 Albert Ludwig University Freiburg Inst. for Microsystem Technology
 
 
 Israel
 
 Shuki Yeshurun, Dr.
 Nanopass Technologies Ltd.
 
 
 Italy
 
 Dario Paolo, Professor
 Scuola Superiore Sant'Anna ARTS/Mitech Labs
 
 Mario Zen, Dr.
 Istituto Trentino Di Cultura-IRST Microsystem Division
 
 
 Japan
 
 Takayuki Hirano
 Micromachine Center
 
 Takashi Mihara, Dr.
 OLYMPUS Optical Co. Ltd. Strategy dept./Corporate R & D Center
 
 Kanju Miyamoto
 Micromachine Center International Exchange dept.
 
 Naomasa Nakajima, Profesor
 The University of the Air
 
 Ryo Ohta
 OLYMPUS Optical Co. Ltd. Laboratry No.2/Corporate R & D Center
 
 Toshiro Shimoyama
 OLYMPUS Optical Co., Ltd.
 
 Hiroya Terashima
 FANUC Ltd. Basic Research Laboratory
 
 
 Korea
 
 Young-Ho Cho, Professor
 Digital Nanolocomotion Center Mechanical Engineering, KAIST
 
 Tae Song Kim
 Korea Institute of Science & Techn. Microsystem Research Scientist
 
 Sukhan Lee
 Samsung Advanced Inst. of Technology
 
 Jong-Oh Park, Dr.Ing
 Intelligent Microsystem Center
 
 
 Norway
 
 Liv Furuberg, Dr.
 SINTEF/University of Oslo Dept. of Microsystems
 
 
 Singapore
 
 Siak Lim, ass.Prof.
 National University of Singapore Mechanical Engineering
 
 Zhenfeng Wang
 Gintic Institute of Manufacturing Tech. Div. of Precision Technology
 
 
 Spain
 
 Carles Cane, Dr.
 Centro Nacional Microelectronica (CNM) Dept. of Microsystems
 
 
 Sweden
 
 Peter Enoksson, Professor
 Chalmers University of Technology Dept. of Microelectronics
 
 
 Switzerland
 
 Claude Clement
 PreciMediX SA
 
 Philippe Fischer
 FSRM Swiss Foundation for Research In Microtechnology
 
 Nico de Rooij, Professor
 University of Neuchatel Institute of Microtechnology
 
 
 Taiwan
 
 Shuo Hung Chang, Professor
 National Taiwan University Dept. of Mechanical Engineering
 
 Fei-Bin Hsiao, Professor
 National Cheng Kung University Inst. of Aeronautics & Astronautics
 
 Chih-Kung Lee, Professor
 National Taiwan University Institute of Applied Mechanics
 
 Lin Min-Shyong, Dr.
 Asia Pacific Microsystems, Inc.
 
 
 The Netherlands
 
 Willem Berg, ir.
 Innofonds Twente.b.v.
 
 Albert van den Berg, Prof. dr. ir.
 MESA+ Research Institute University of Twente
 
 Wijnand Calseijde, Ir.
 Twinning Investment Management
 
 Kees Eijkel
 MESA+ Research Institute University of Twente
 
 Paul Gennissen
 Texas Instruments Holland
 
 Jans Kruise, Dr.ir.
 Texas Instruments Holland
 
 Henk Leeuwis, Ir.
 Lionix BV
 
 Regina Luttge
 MESA+ Research Institute University of Twente
 
 Tim Markus, Drs.
 Provincie Overijssel
 
 Lina Sarro, Professor
 Delft Unversity of Technology DIMES
 
 Wolfgang Tostmann, Drs.
 Ministry of Economic Affairs ICT Department
 
 
 United Kingdom
 
 David Allen, Professor
 Cranfield University SIMS
 
 Geoff Beardmore, Professor
 MYRIAD-Technology
 
 Ayman El Fatatry, Dr.
 BAE SYSTEMS Adv. Techn. Centres
 
 Ron Lawes, Professor
 CCLRC-Rutherford Appleton Laboratory Engineering Department
 
 Vishal Nayar, Dr.
 QinetiQ
 
 Nadeem Rizvi, Dr.
 Exitech Ltd. Oxford Insustrial Park
 
 Deepak Uttamchandani, Professor
 University of Strathclyde Dept. of Electronic & Electr.Engineering
 
 
 United States of America
 
 Raffaella Borzi, Ph.D.
 IMEC Inc.
 
 Michael Gaitan
 NIST MEMS Project, Semiconductor Elect.Div.
 
 
 |  |  
      |  |  
      |  |  
      | 
        
          
            | 
              
                
                  | The 8th MICROMACHINE SUMMIT -- The dawn of maturity |  
                  |   A common strand featured at this year's World Micromachine Summit:
                  Nanotechnology. Almost all the presenters referred to the impact of, the fusion between
                  and the implications of nanotechnology and microsystems on current and
                  future applications.
 This remarkable change of emphasis could, possibly, become a milestone
                  flagging the relative maturity of microtechnologies and the emergence of
                  nanotechnology.
 
 The national/regional reports from across the world at this summit
                  (The 8th held at Maastricht on the 1st and 2nd of May, 2002), provided
                  updated accounts of programmes and developments since the last summit in
                  2001 at Freiburg.
 
 The review from the USA outlined examples of some of the relevant
                  projects funded by the National Science Foundation (NSF), the Defense Advanced
                  Research Projects Agency (DARPA) and the National Institute of Standards
                  and Technology (NIST). The various programmes and projects, currently being
                  supported by these three bodies, tend to have a biotechnology trend emphasising
                  the shift towards nano-biotechnology in the USA. In this context, the NSF
                  has sponsored the formation of a National Nanofabrication Users Network
                  (NNUN). With regards to MEMS/Microsystems, a number of Industry Groups
                  have been established to serve a similar purpose. The trend towards developing
                  optical and RF MEMS remains strong in spite of the downturn of the IT/Telecom
                  Industry.
 
 The situation in the UK was summarised as also shifting in interest
                  towards nanotechnology although MEMS remained predominant for commercial
                  exploitation as evidenced by the increasing number of spin-offs and SMEs.
 
 In Taiwan, the completion of the 6th year of the national MEMS programme
                  was marked by the successful operation of the MEMS Common Laboratory at
                  the Industrial Technology Research Institute (ITRI). MEMS is now deemed
                  to be approaching maturity, prompting the National Science Council (NCS)
                  of Taiwan to direct emphasis to nanotechnology through the (re)formation
                  of the MEMS and Nanotechnology Advancement Team Program. Taiwan plans to
                  invest approximately $600 million on nanotechnologies in the fields of
                  micro-fuel cells, packaging and biotechnology. This programme of investment
                  is scheduled to start the first quarter of 2003 and last until the year
                  2007.
 
 The review from Switzerland maintained a similar view with regards
                  to the maturity of microtechnologies. This was demonstrated via "typically
                  Swiss" commercial products such as wrist watches incorporating silcon-based,
                  micromechanical, pressure sensors and cog wheels. New initiatives are planned
                  to merge the fields of Nanotechnology and MST/MEMS.
 
 The situation in Singapore was reported to be less buoyant than
                  was expected a year or so ago. The economic downturn, over the year, has,
                  it was reported, led to a 20% cut in the funding made available for MEMS
                  projects. None the less, a number of MEMS-based projects continue to be
                  supported, including simulation and modelling work at the Institute of
                  High Performance Computing amongst other institutions.
 
 The strong interest in biotechnology in the Nordic region of Europe
                  has prompted the establishment of interdisciplinary research projects,
                  collaborations and educational courses in addition to the ongoing programmes
                  supporting microtechnologies. Norway, Finland, Sweden and Denmark all boast
                  a fair number of new (or relatively new) start-ups offering either products
                  or foundry services. In essence, commercialisation is taking its course.
 
 Mediterranean nations such as Spain, Greece and Italy reported a
                  continuing effort in developing MST-based sensing systems in response to
                  the industrial, agricultural and agroalimentary needs of these specific
                  nations. A couple of new start-ups in Spain aiming to produce sensors for
                  household appliances and food quality control were announced. In Greece,
                  a newly established Network on Microsystems and Micro-Nanotechnology (MMN)
                  was set up to promote the technology. In Italy, on the other hand, where
                  microsystems technologies is well established, two new National Research
                  programmes were launched in 2001, to address nanotechnologies and new materials
                  as well as microsystems. Of note, in Italy, is the recent interest in developments
                  relating to the electronic nose (e-nose) giving rise to 3 new start-up
                  companies over the last year.
 
 The Korean national programme on microsystems continues to make
                  progress as was outlined by the impressive results on developments of micro-biomedical
                  diagnostic systems for endoscopic microcapsules. In parallel to this ambitious
                  programme, the Korean government has launched a $1.4 billion programme
                  on Nanotechnology (2001-2010). This national programme will address almost
                  all aspects of nanotechnology which, along with Information Technology
                  and Biotechnology forms one of the three most important technologies for
                  the 21st Century identified by the Korean government.
 
 The 10 year long national "Micromachine" project in Japan
                  was reported to have concluded its course successfully boasting the generation
                  of over 500 patents and a number of commercial products as deliverables.
                  Plans are, currently, being assessed for the launch of a national strategy
                  for nanotechnology focussed on materials, processing, manufacturing and
                  research.
 
 Activities in France continue to be underpinned by strong
                  co-ordinating networks such as the French National Research Network in
                  Micro and Nano-Technologies (RMNT) as well as the recently launched initiative
                  for research and technology transfer, MINATEC, in Grenoble. MINATEC will
                  provide education, training, research and facilities for high-tech industries
                  aimed at supporting European Leadership in Micro and Nano-technologies.
                  Finally, some "Colleges of Engineering" across France have begun
                  to incorporate MEMS-related topics within their curricula. These topics
                  include practical clean room processing and microfabrication techniques.
 
 MEMS/Microsystems developments in China were reported to have gained
                  prominence following the results of a strategic study conducted by the
                  Chinese Ministry of Science and Technology. The study identified micro-sensors,
                  information-MEMS and bio-MEMS as priorities with emphasis on MEMS fabrication
                  and nanotechnology. Within 2001, alone, 6 conferences on MEMS were held
                  in China. This year, another 8 conferences are planned. The technology
                  seems also to be enjoying international prominence through a number of
                  reported collaborative ventures aimed at commercialising some of the developments
                  undertaken by research and academic establishments in China.
 
 University research by Canadian Universities was reported to be
                  advancing in the fields of MOEMS and RF MEMS amongst other, more general,
                  mechanical designs. Industrial activities, on the other hand, appears to
                  be gearing towards productionisation through the establishment of MEMS-specific
                  fabrication lines and foundries. These facilities will capitalise on the,
                  impressively, large number of designs (in excess of 180) fabricated by
                  Canadian Institutes since 1997.
 
 The situation in Belgium and the Netherlands with regards to MEMS
                  developments was also indicative of the maturity of this technology. Major
                  players, spanning academia, institutions and companies are focusing efforts
                  on specific applications in the fields of bio-analysis and telecommunications.
                  National Nanotechnology programmes have also been initiated to help galvanise
                  the research in this new field of research.
 
 Finally, the Australian government has focussed nationally-funded
                  research onto four priority areas: (1) Nano and bio materials, (2) Genome/Phenome
                  research, (3) Complex/Intelligent Systems and (4) Photon science and technology.
                  Microsystems research has, as a result, been directed to address these
                  specific areas. In this context, and underlying this programme, are plans
                  for national facilities including the Bandwidth Foundry for Photonic ICs,
                  a 110 meters diameter synchrotron, the MiniFAB fabrication facility and
                  a national network for nanostructural analysis (NANO). Such facilities
                  as well as the national focus will, it was reported, help Australian institutions
                  and industry exploit new opportunities offered by Nano and Microtechnology.
 |  
                  | OVERALL IMPRESSION
 
 The national reports on the state-of-the-art of microtechnology
                  could, it may be concluded, confirm that this technology is indeed nearing
                  maturity. Details of the newly established nanotechnology initiatives helped
                  only to corroborate this view amongst the (70 or so) delegates gathered
                  in Maastricht. Commercialisation of MEMS-based devices is underway, particularly
                  in the fields of bio-diagnostics. This continues to be enabled by national
                  initiatives, programmes and facilities. The new focus on nanotechnology
                  was proclaimed to be complementary to ongoing developments in microsystems,
                  adding functionality and capabilities to systems and subsystems.
 
 Finally, this summit, organised jointly by the MESA+ Research Institute
                  (Netherlands) and IMEC (Belgium), was considered by all attendees to have
                  been a success and, probably, a milestone for Microsystems. Next year's
                  summit, scheduled for Beijing, China on the 1st and 2nd of May 2003, will,
                  it is hoped continue to report world-wide success of microtechnology commercialisation
                  as well as advancements in nanotechnology research.
 |  
                  | Ayman El Fatatry - BAE SYSTEMS
 Kees Eijkel - MESA+ Research Institute
 Albert van den Berg - MESA+ Research Institute (Summit Chairman)
 Kris Baert - IMEC (Summit co-chair)
 
 8 May, 2002
 |  |  |  
      |  |  
      |  |  |