Micromachine Summit >  2nd  (1996)

2nd Micromachine Summit

24-26 April, 1996
Montreux, Switzerland

Organized by
  - IMT Institute of Microtechnology
  - University of Neuchatel
  - FSRM Swiss Foundation for Research
      in Microtechnolology

Program Participants Chairman's summary

Represented Countries

European Union
The Netherlands
United Kingdom


Supporting Organizations
European Union DGIII,
Science Agency of the Swiss Confederation,
Swiss Federal Office for Education and Science,
Board of the Swiss Federal Institutes of Technology,
Swiss Federal Institute of Technology Lausanne,
Swiss Federal Institute of Technology Zurich,
Swiss Academy for Technical Sciences.

Organizing Committee

Prof. Dario (I),
Prof. de Rooij (CH),
Prof. Dorey (UK),
Prof. Fluitman (NL),
Mr. Fischer (CH),
Prof. Hauden (F),
Prof. Menz (D),
Dr. Rudolf (CH)


IMT Institute of Microtechnology,
University of Neuchatel
FSRM Swiss Foundation for Research in Microtechnolology

2nd Micromachine Summit

24-26 April 1996, Montreux, Switzerland
Wednesday, 24 April 1996

Wednesday, 24

Optional visit the CSEM and the IMT of the University of Neuchatel

Train connections: Departure from Zfirich airport: Arrival in Neuchatel
Geneva airport:11:44 13:06
Montreux:11:43 13:00
13:30 to 16:00 Visit of CSEM and IMT
16:15 Bus departure for Montreux
17:45 Arrival at the Montreux Palace
19:00 Welcome cocktail at the Montreux Palace
Welcome address from a representative of the City of Montreux and
from the State Secretary for Science and Research Prof. H. Ursprung

Thursday, 25 April 1996

09:00 Opening of the 2nd World Micromachine Summit by Nobel Price laureat Dr. H. Rohrer

Country reviews

09:15 USA Muller, Richard , Director University of California Berkeley Berkeley Sensor & Actuator Center
09:25 Japan Nakajima, Maomasa , Director University of TokyoDept. of Mechanical Engineering for Prod.
09:35 Canada Guild, Gordon , President Simon Fraser University Micromachining Technology Center Ltd.
09:45 Australia Bates, Ian , Professor Royal Melbourne Institute of Technology Faculty of Engineering
09:55 France Hauden, Daniel , Director LPMO
10:05 Great Britain Dorey, Howard , Professor Imperial College of ScienceTechnology and Medicine
10:15 Italy D'Amico, Arnaldo , Professor University of Roma Tor Vergata
10:25 The Netherland Fluitman, Jan H. , Director University of Twente Mesa Institute
10:35 Germany Menz, Wolfgang , Director Albert-Ludwigs-Universitat Freiburg Institut far Mikrosystemtechnik
10:45 Switzerland De Rooij, Nicolaas F. , .Director Universite de NeuchatelInstitut de Microtechnique
10:55 Discussion on the country reviews
11:10 Break

Scope of Micromachine

11:30 Pfiuger, Peter Chief Executive Officer CSEM S.A., CH
11:40 Nakajima, Maomasa Director University of Tokyo,JDept. of Mechanical Engineering for Prod.
11:50 Discussion on the scope of micromachines
12:15 Lunch


14:00 Menz, Wolfgang Director Albert-Ludwigs-Universitat Freiburg, D Institut for Mikrosystemtechnik
14:10 Eiscussion on standardization

Research and education

14:25 Ikuta, Koji Professor Nagoya University, J
14:35 Najafi, Khalil Professor University of Michigan, USA
14:45 Fluitman, Jan H. Director University of Twente,NL Mesa Institute
14:55 Discussion on research and education
15:10 Break

R&D Programmes and role of governments

15:40 Crawford, Deborah Program Director National Science Foundation, USA
15:50 Gabriel, Kaigham Deputy Director Electronics Technology Office DARPA, USA
16:00 Menozzi, Gaitan Chairman NEXUS, EU
16:15 Gagnepain, Jean-Jacques Directeur Dipartement Sciences pour l'Inginieur C.N.R.S., F
16:25 Hirano, Takayuki Executive Director Micromachine Center, J
16:35 Discussion on R&D Programmes and role of governments
16:50 Conclusions and adjourn of the day
17:00 Meeting of the chief delegates

Friday, 26 April 1996
Social & industrial impacts of micromachines

08:30 Dorey, Howard Professor Imperial College of Science, UK
08:40 Shimoyama, Toshiro Chairman Olympus Optical Co., Ltd., J
08:50 Discussion on social & industrial impacts of micromachines

Needs expressed by the industry

09:05 Ishimaru, Tsuneo President Nippondenso Co., Ltd., J
09:15 Rudolf, Fglix Section Head CSEM S.A., CH
09:25 Discussion on needs expressed by the industry
09:40 Break


10:10 Axelrad, Constant Marketing Manager CEA-DTA, F
10:20 Hu, Chang-Tze Director of German Office Representative Office in Europe National Science Council, Taiwan
10:30 Moritomo, Sadao Vice-President Seiko Instruments Inc., J
10:40 Giachino, Joseph M. Program Manager Electronic Division Ford Motor Company, USA
10:50 Hocker, G. Benjamin Principal Research Fellow Honeywell Technology Center, USA
11:00 Discussion on markets
11:15 Conclusions of the 2nd World Micromachine Summit
12:00 Aperitif
12:30 Lunch at the Montreux Palace


  • Bates, lan
    Royal Melbourne Institute of Technology
    Faculty of Engineering


  • Coderre, William
    Science & Technology Councillor
    Canadian Mission to the European Union
  • Guild, Gordon
    President, Simon Fraser University
    Micromachining Technology Center Ltd.
  • Jerominek, Hubert
    Head of Photonic Materials & ProcessesNational Optics Institute
  • Lumb, Chris
    President, Alberta Microelectronics Centre

European Union

  • Menozzi, Gaetan
    Marketing and Strategy Manager Sextant Avionique Div. Navigation Valence


  • Axelrad, Constant
  • Clerc, Jean-Frederic
    Microsystem Programm Manager CEA I LETI
  • Gagnepain, Jean-Jacques
    Directeur C.N.R.S.Departement Sciences pour l'Ingenieur (Spl)
  • *Hauden, Daniel
    Directeur LPMO
  • Lasseur, Jean
    Directeur, Schlumberger Etudes et Production
  • Leclerc, J.
    Directeur, Sextant Avionique
  • Puers, B.
    Head of technology Katholieke Universiteit Leuven
    Dept. Elektrotechniek Afdeling ESAT


  • Blum, Hartmut
    Jenoptik Technologie GmbH
  • Hu, Chang-Tze
    Director of German Office
    National Science Council, TaiwanRepresentative Office in Europe
  • Menz, Wolfgang
    Professor, Albert-Ludwigs-Universitat Freiburg
    Institut fur Mikrosystemtechnik
  • Mollendorf, Manfred
    Head of Microsystem Technology Robert Bosch GmbH
    Corporate R&D
  • Schweitz, Jan-Ake
    Professor, Uppsala University Institute of Materials Science
  • Paasche, Sascha
    Senior Manager Microelectronics & MSTDaimler-Benz AG Research and Technology

Great Britain

  • Beardmore, Geoff
    Professor, Smiths Industries Ltd.
  • Bertioli, Mike
    Director, Druck Ltd
  • Dorey, Howard
    Professor, Imperial College of Science Technology and Medicine
  • Lawes, Ronald A.
    Professor, Rutherford Appleton Laboratory Central Microstructure Facility
  • Ohlkers, Per
    R&D Manager SensoNor A.S.


  • Alessandretti, Giancarlo
    Director, Centro Ricerche Fiat Sistemi e technologie optomeccaniche
  • D'Amico, Arnaldo
    Professor, Universita di Roma "Tor Vergata"
    Dip. Ingegneria Elettronica
  • Foglietti, Vittorio
    IESS-CNR, I - Roma Soncini, Giovanni
    Professor University of Trento


  • Hirano, Takayuki
    Executive Director, Micromachine Center
  • Ishimaru, Tsuneo
    President, Nippondenso Co., Ltd.
  • Moritomo, Sadao
    Vice-President, Seiko Instruments Inc.
  • Nakajima, Naomasa
    Director, The University of Tokyo
    Dept. of Mechanical Engineering for Prod.
  • Shimoyama, Toshiro
    Chairman, Olympus Optical Co., Ltd.


  • De Rooij, Nicolaas F.
    Directeur, Universite de Neuchatel
  • Dual, Jurg
    Professor, Institut for Mechanik
  • Pfluger, Peter
    Chief Executive Officer, CSEM S.A Rohre, Heinrich
    IBM Research Laboratory
  • Salathe, Rene Paul
    Director, EPFL Centre d'application Laser(CAL)

The Netherland

  • Elders, Job
    Director, Twente MicroProducts
  • Fluitman, Jan H.
    Director, University of Twente Mesa Institute
  • Petersen, Jon Wulff
    Director, Mikroelektronic Centret
  • Sygall, Petee
    Director, Philips Components Magnetic Heads & Modules


  • Crawford, Deborah
    Program Director, National Science Foundation
  • Gabriel, Kaigham
    Deputy Director, DARPA Electronics Technology Office
  • Giachino, Joseph M.
    Program Manager, Ford Motor Company
    Electronic Division
  • Hocker, G. Benjamin
    Principal Research Fellow
    Honeywell Technology Center
  • Muller, Richard
    Director, University of California Berkeley
    Berkeley Sensor & Actuator Center
  • Najafi, Khalil
    University of Michigan, EECS

  The second World Micromachine Summit was held on 24 - 26 April 1996 in Montreux, Switzerland. 50 delegates and experts from 10 countries around the world exchanged views and opinions about micromachines, their impact on society and on industry and their future development. Country reviews allowed a comparison of the awareness on micromachine or microsystems technologies around the world and also a comparison of the national efforts to develop those technologies.Extensive discussion were conducted on seven major issues related to micromachines with following conclusions:

Country reviews
  There is a growing interest in MEMS in the countries presented. Nevertheless, industrial sectors are far better informed on the subject than politicians. Specific education in the MST field is in development.Most of the reviewed countries have research programs that are MST related although public expenditure in this area varies very much from country to country. Reliable figures arc difficult to assemble because of the breadth of MST projects or, in some cases, because of their confidential nature.The majority of the companies involved in MEMS are SMEs, although some very large companies are also active in this field.

Research and education
  Students should have a solid scientific background before in order to be proficient in the MST field.International mobility of both students and staff should be encouraged. The development of awareness to MST starts very early in Japan (elementary school). In Europe and in North America, MST education begins at the university level, mostly toward the end of undergraduate studies and at postgraduate level.Regarding research, systems development has become an important goal of the efforts on MEMS and micromachines.

Scope of micromachines
  There is no consensus on the definition of microsystems and micromachines. Finding a common language is therefore an important challenge. Microsystems can be good way to improve the image of technology in the public. Nevertheless, researchers have to be careful not to raise unrealistic expectations on the part of public or industry when they present their conceptions about the possible evolution of microsystems. It is important to avoid confusion between dreams and reality.

  Standardization is necessary in order to promote the exchange of ideas and processes, but it does not have to inhibit the development of MEMS. There is clearly a need for concerted action on this subject, and how to approach this issue needs to be discussed.

R&D programs and role of governments.
 Japanese and American programs have some common points: they both support education, infrastructure availability and the flow of information among interested industries and academics.Europe also supports education in MST through its research facilities. As opposed to other countries, Japan funds risky and long-term research and development. MEMS have also many application in the defense field.

Social and industrial impact of micromachines.
 It is generally acknowledged that the social impact of micromachines will be considerable in the 21st century, but there are signs that is has already began in many areas. Micromachines will make life easier in many ways.It was pointed out that micromachines will have dramatic effects on the field of health care. Minimally invasive surgery, intelligent drug delivery systems for external remote control and medication are two positive examples in which MST will make the lives of patients more comfortable and reduce their time in hospitals.Automobiles will benefit from micromachines technology and become safer and more comfortable.Information technology and telecommunication are other areas in which developments are closely related to miniaturization technologies.The expected wide use of microsystems for intelligent sensing and controlling in cars, houses, industrial equipment and entertainment goods will make it imperative that MST systems be implemented in simple, replacement-mode packages.More generally, micromachines will not solve unemployment problems. Micromachines can hardly be assembled by hand and their volume production will rely on highly automated production lines. Micromachines will generate a new industry which, unlike the present microelectronics industry, will consist initially of small and medium sized manufacturing companies.

Needs expressed by the industry.
 The industry has a considerable responsibility in the society, not only by the products put on the market, but also by the way to manufacture them. Micromachines can play a large role in creating human-friendly manufacturing procedures.Micromachines will provide solutions for plants maintenance with a minimum waste of time, for micro manufacturing of small products, minimizing energy, space and mineral resource consumption and for environmental protection, since industrial companies are highly responsible for preventing pollution.Micromachine technologies will allow the creation of smaller, safer, higher performance and more user-friendly products. In order to make advance in all fields necessary for the development of micromachines, industry encourages international cooperation and exchange of information.To introduce a micromachine or microsystem in a larger product, a company will normally not want to build up competence and manufacturing capacities for this component. Since it is in most of the case a key part of the final product, the company needs a reliable supplier for this component. This leads to the emergence of a new supply industry which needs to address specific issues that are more broadly based than those of the microelectronics supplying industry.

 Some market forecasts published in the early 90's were overly optimistic. The present market for microsystems is dominated by microsensors, mostly for the automotive industry, which pulls the development of microsystems with its high production volume. Other examples can be found in computer peripherals, such as ink-jet printer heads and hard-disk heads or in the medical field with disposable blood pressure sensors.In many cases, the microsystem is a low-cost component that provides important added value to a final product.The future market of microsystems will be divided into a replacement sector in which a microsystem solution can bring better performance or lower cost, and a sector that introduces entirely new products.In the replacement market, the benefits of a new solution must be very important; it is usually difficult to replace a proven and mature product. New opportunities represent the best focus for microsystems technology in the next years. Across the broad scope of engineering systems, there are many recognized, but unmet needs that can be impacted by innovative micromachine technologies.The Japanese market has been estimated by the Micromachine Center to grow to about $ 5.7 billions for replacing products and $ 2 to 19 billions for new opportunities in 2005.

Next Micromachine Summit
 The delegates decided to continue to exchange opinions and information on an annual basis and to hold a 3rd World Micromachine Summit in 1997.In will be held in British Columbia, Canada, and will bring together delegations from countries active in the micromachine area around the world.The delegates also decided to appoint the Micromachine Center (J) to the permanent secretariat of the World Micromachine Summit.


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