Micromachine Summit >  3rd  (1997)

3rd Micromachine Summit

28-30 April, 1997
Vancouver, Canada

Organaized by Simon Fraser University

Program Participants Chairman's summary

Host Organization
Simon Fraser University

Supporting Organizations

Alberta Microelectronics CentreBritish Columbia
Ministry of Employment & Investment
Canadian Microelectonics Corporation
National Research Council of Canada
Western Clinical Engineering Limited

3rd. Micromachine Summit

28-30 April, 1997
Vancouver, Canada

The Micromachine Summits are international forums that actively consider and inter-change ideas about the impact on industry, society, and the environment of the field including microerectromechanical systems (MEMS) or Microsystem Technology (MST). Thirteen country/regions in the world that are active in this field of research and production send delegates to the Summit to promote dialogue and idea interchange.

Monday April 28

6-8pm Welcoming Reception

Westin Bayshore Hotel

Marine Room

Tuesday April 29

All meeting sessions will be held in the Ballroom

8:30am Opening of the Summit
Chair, Mr. Gordon Guild
President,MTC Micromachining Technology Centre, Canada
8:45 Session 1:Country/Region Reviews
United Kingdom
United States America
10:45 Break
11:15 Session 2:Standardization
Dr. Wolfgang Menz / Director,Albert-Ludwigs Universitaet Freiburg, Germany
Mr. Takayuki Hirano / Executive Director, Micromachine Center, Japan
Discussion on Standardization
12:15pm Lunch
Marine Room
1:45 Session 3:Healthcare
Dr. Daniel Esteve / Head, Microstructures Dept.,LAAS-CNRS, France
Mr. Chris Lumb / President and CEO , ALberta Microelectronics Centre,Canada
Dr. Toshiro Shimoyama / Chairman and CEO , Olympus Optical Co., Japan
3:15 Break
3:45 Session 4:Environment
Dr. Howard Dorey /Professor , Imperial College, UK
Dr. Benjamin Hocker / Director , Honeywell Technology
Dr. Tsuneo Ishimaru / Chairman , Denso Corporation, Japan
Discussion on Environment
5:15 Open Question Period
5:30 Adjourn for the day
6:15 Buses depart the Westin Bayshore for the Museum of Anthropology
7:15 Tour of the Museum of Anthropology
8:15 First Nations Dinner featuring traditional native cuisine and dance International House

Wednesday, April 30

9:00am Session 5:New Horizons and New Materials
Dr. Erol Harvey / Senior Development Engineer , Exitech Ltd., UK
Dr. D.Jed Harrison / Professor , University of Alberta, Canada
Discussion on New Horizons and Materials
10:00 Response to Tuesday's Open
Question Period
10:30 Break
11:00 Session 6:Transportation
Dr. Wendong Zhang / Professor, North China Institute of Technology,China
Mr. Richard Payne / Vice President , Analog Devices Inc., USA
Dr. Michael Ward / Business Manager, Sensors , Defence Research Agency, UK
Discussion on Transportation
12:30pm Lunch
Boathouse Room
Meeting of the Chief Delegates Hunt Room
2:00 Session 7:Information Technology
Dr. Sadao Moritomo / Executive Vice President , Seiko Instruments Inc., Japan
Dr. Gunnar Edwall / Director , Ericsson Components AB, Scandinavia
Discussion on Information Technology
3:00 Conclusion of the Summit
3:15 Adjourn



  • Prof. Ian Bates
    Assoc. Dean, R&D
    Royal Melborne Institute of Technology
  • Mr. Michael J. Dalling,
    Managing Director
    Strategic Industry Research Foundation
  • Dr. Michael J. Murray
    Chief of Materials, Science and Technology CSIRO
  • Prof. Dinesh Sood, Researcher
    Royal Melbone Institute of Technology


  • Dr. Albert van den Berg
    Dept. of Electrical Engineering
    MESA Research Institute, University of Twente
  • Dr. Job Elders
    Dept. of Electrical Engineering
    Twente MicroProducts, University of Twente


  • Mr. Gordon Guild
    President MTC Micromachining Technology Centre
    Simon Fraser University
  • Mr. Dan Gale
    Vice President & Dir of Strategic Planning
    Canadian Microelectronics Corporation
  • Dr. D. Jed Harrison
    Professor Department of Chemistry,
    University of Alberta
  • Mr. Chris Lumb
    President and CEO, Alberta Microelectronic Centre
  • Dr. M. (Ash) Parameswaran,
    Director Institute of Micromachine & Microfabrication Research,
    Simon Fraser University


  • Prof. Zhaoying Zhou
    Chairman Department of Precision Instruments & Mechanology,
  • Mr. Zu-wu Yun
    China Yuanwang (Group) Co.
  • Prof. Wenalong Zhang
    Dept. of Instruments & Measurement Tech.
    North China Institute of Technology


  • Mr. Daniel Hauden
    Director LPMO-CNRS
  • Mr. Daniel Esteve
    Head Microstructure Department, LAAS-CNRS
  • Mr. Michel Froelicher
    General Director CETEHOR


  • Dr. Wolfgang Menz
    lnstitut fuer Mikrosystemtechnik Albert-Ludwigs-Universitaet Freiburg Universitaetsgelaande
  • Mr. Hartmut Blum
    Jenoptik Mikrotechnik
    GmbH Germany
  • Mr. Patric Salomon
  • Dr. Reiner Wechsung
    MicroParts GmbH


  • Prof. Paolo Dario
    ARTS Lab, Scuola Superiore
  • Dr. Franco Mori
    Electronic Division,
  • Dr. Francesco Simonelli
    Gefran Sensori s.r.l.
  • Dr. Mario Zen
    ITCflRST Istituto per la Ricerca Scientificae


  • Prof. Naomasa Nakajima, Professor
    Div. of Engineering, Graduate School University of Tokyo
  • Mr. Takayuki Hirano
    Executive Director Micromachine Center
  • Dr. Tsuneo Ishimaru
    Chairman Denso Corporation
  • Dr. Sadao Moritomo
    Executive Vice President, Seiko Instrumments, Inc.
  • Dr. Toshiro Shimoyama
    Chairman & CEO, Olympus Optical Co. Ltd.


  • Dr. Ingemar Lundstrom
    IFM - Linkopings Universitet
  • Dr. Gunnar Edwall
    Ericsson Components AB/FORC
  • Mr. Dag Sigurd


  • Prof. Nice de Rooij
    Institute of Microtechnology
    University of Neuchatel
  • Mr. Philippe Fischer
    FSRM, Swiss Foundation of
    Research in Microtechnology
  • Dr. Volker Gass
    Mecanex SA Z.I. Nord
  • Prof. Rene P. Salathe
    Dept. of Microtechnology
    Swiss Federal Insitute of Technology Lausanne
    ME Ecublens


  • Dr. Min-Shyong Lin
    Executive Vice Presiden
    Industrial Technology Research Institute
  • Mr. Yao Chang
    Associate Research Scientist, Synchotron Radiation Research Centre
  • Prof. Star Ruey-Shing Huang
    Department of Electrical Engineering National Tsing Hua University
  • Prof. Jin-Shown Shie
    Institute of Electro-Optics National Chiao Tung University

United Kingdom

  • Prof. Howard Dorey
    Dept. of Electrical & Electronic Engineering Imperial College
  • Prof. Geoff Beardmore
    Smiths Industries Aerospace & Defence Systems Ltd.
  • Dr. Erol Harvey
    Senior Development Engineer Exitech Ltd.
  • Prof. Ron Lawes
    Appleton Laboratory Central Microstructure Facility, CLRC
  • Dr. Michael Ward
    Business Manager,
    Sensor Defence Research Agency

United States of America

  • Dr. Richard Muller, Professor
    Dept. of EECS, University of California
  • Mr. David S. Eddy
    Research & Development Center
    General Motors
  • Dr. G. Benjamin Hocker
    Honeywell Technology Center
  • Dr. Richard S. Payne
    Analog Devices Inc.
  • Mr. Jack Shaw
    Chief Engineer of Technology Boeing Commercial Airplanes Group


  The third World Micromachine Summit was held in Vancouver, Canada on April 28-30, 1997. For the first time, the number of delegations was expanded to take into account the spread of activity in micromachining around the world. In order to keep numbers down to a practical level for open discussions, the concept of a regional delegation was introduced. 50 delegates from 13 countries/regions exchanged views on micromachining, before an audience of 31 international observers.

  The Summit started with the country/region reviews, followed by presentations and discussions on six topics. An experimental feature, the open question and answer period opened the Summit to a wider range of issues.

  Topics were explored and advances were made in defining and understanding the issues, to say that conclusions were reached would be a bit presumptuous. Given that caveat, the results of the Summit discussions were:


  Circumstances differ markedly from region to region, in industrial activity, government support and public perception, however each country/region is dealing with some common problems. Micromachining is in a stage of rapid advancement and this means knowledge must be diffused throughout industry at a comparable pace, or bottlenecks and frustration are inevitable. General public attitudes towards science & technology, as well as micromachining in particular, are important factors in the development of micromachined products and the micromachining industry in each society. Therefore, the issue of diffusion of knowledge about micromachining applies to the whole society.

  SME's continue to lead the way in most countries/regions, and finding ways to start and expand production of micromachined devices at a cost SME's can cope with, is a subject of much attention. Advances in packaging, testing and standardization are seen as key to continued expansion.

  The needs of the medical, environmental and auto industries are driving development of microsystem technology in most countries/regions.


  There is general agreement on the need for standardization at an early stage, but the scope and appropriate mechanism are still matters for debate. Many delegates consider standardization an important issue for an international forum dedicated to the advancement of micromachining, however the subject requires much more time than can possibly be allotted at the Summits. Therefore, delegates were asked to consider attending a separate meeting on standardization. This new working group is expected to be formed over the next few months, and will report on its progress at future Summits.


  Medical diagnosis and treatment remains one of the most fruitful areas for application of micromachine technology. Long term major trends such as the shifts to non-invasive diagnosis, minimally invasive surgery, greater home care, and in situ testing at the bedside or in the field with a paramedic unit, all bode well for increased use of micromachined components. Delegates were advised that close cooperation with medical doctors, and strict attention to the customers needs are essential in a market characterized by short product life cycles. Issues such as bio-compatibility and reliability are particularly important in healthcare products.


  Monitoring the indoor environment of our homes, to a global monitoring system, the field is immense. On line sensors coupled to feedback control will be used to increase our comfort, safety and protection in the home and in public buildings. Large markets exist to monitor water and air quality driven both by industry's need to meet regulations, and their desire to improve process control, minimizing use of energy and raw materials. Many environmental issues are global in nature, such as carbon loading of the atmosphere.

  Effects are difficult to predict, causes difficult to determine, a global monitoring system may be necessary to collect sufficient information. Micromachined sensors are a practical way to minimize cost, use of energy, use of materials, and waste in all these applications.


  Our look into the future stressed alternate materials and processes. Lasers are being used on non-planar substrates and flexible materials in applications ranging from aerospace to food packaging. Micro-fluidic systems for use in DNA and Immune assays, drug screening & synthesis, and automated chemical reactors are being developed using alternatives to the traditional silicon IC based technology. Delegates were reminded that micromachining is very much a multi-disciplinary field requiring expertise in chemistry, physics and biology as well as mechanical and electronic engineering.


  The use of micromachined devices in the transportation industry is well known and of comparatively long standing. The industry provides excellent examples of the process involved in moving from a research concept to a commercially successful micromachined product. New products and new applications for existing products continue to expand the market for microsystem technology in automotive and aerospace applications. The low cost and size of micromachined sensors allow us to consider the application of large sensor arrays with many different sensor types to greatly enhance system reliability.


  The instruments used to create, transfer and store information grow increasingly miniaturized. Micromachining is expected to play a major role in manufacturing these miniature devices, but integration of current micromachining research is required. In telecommunications the drive for real time interactive multimedia means increasing use of optics. Production of micro-optical devices increasingly means use of micromachining to keep costs down.


  The chief delegates accepted the offer of Dr. Bates to host the fourth World Micromachine Summit next year in Melbourne, Australia.


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