Micromachine Summit > 4th  (1998)

4th Micromachine Summit

29 April-1 May 1998
Melbourne, Australia

Organized by RMIT University

Welcome to the 1998 Micromachine Summit.



Chairman's summary

The Micromachine Summits:
  • actively consider and exchange ideas about the impact on industry, society and the environment of Micromachines, including Microelectromechanical Systems (MEMS) or Microsystem Technology (MST)
  • comprise delegates from thirteen countries/regions in the world that are active in research and production concerning the Micromachine industry.
  • report on the status, directions and critical issues concerning Micromachine developments in the countries/regions represented
  • present in a non-technical manner the state of the art applications and production methods, future possibilities, how Micromachines can change the way people live and work and the national initiatives and policies which might be adopted to give humankind the maximum benefit from Micromachines
  • provide a forum to enable a vital interchange of innovative and provoking thought on Micromachines.

Your host, RMIT University, wishes you a most rewarding and stimulating time in Australia. Chair 1998 MICROMACHINE SUMMIT

Professor Ian Bates


4th Micromachine Summit

29 APRIL 1 MAY, 1998

The Micromachine Summits are international forums that enable vital interchange of innovative and provoking thought about the critical issues and impact on industry, society, and the environment of Micromachines including microelectromechanical systems (MEMS) or Microsystem Technology (MST). Thirteen countries/regions in the world that are active in this field of research and production send delegates to the Summit. The aim is to exchange ideas on the status, provide practical examples and consider possible initiatives on how Micromachines can change the way we work and live and bring benefits to humankind.

Wednesday April 29

7.00 Welcoming Reception
Kensington Room
Grand Hyatt
123 Collins Street

Thursday April 30

8.00 Bus Departs Hyatt for RMIT.
All meeting session will be held in Storey Hall, RMIT University, Swanston Street. Morning tea, afternoon tea and lunch will be in the foyer.
8.30 Opening of Summit
Chair 1998 Summit
Prof. Ian Bates
RMIT University Australia
8.45 Session 1:
Country/Region Reviews
Critical issues, driving forces for Micromachine development, particular examples and national initiatives.
*Australia *Benelux *Canada *China *France *Germany *Italy *Japan
*Scandinavia *Switzerland *Taiwan *United Kingdom *USA

Questions and Discussion

10.45 Morning Tea Break
11.15 Session 2:
Applications across Major Industries Automobile, aerospace, power generation, telecommunication, information technology, medical

Applications and Development of CMOS-Compatible Microbolometers
Dr. Jin-Shown Shie Institute of Electro-Optics, Taiwan

Flying Micromachines into the Next Millennium
Prof. Geoff Beardmore
Smiths Industries Aerospace & Defence Systems, UK

Surface Micromachining for Microphotonics
Prof. Richard Muller
Director, Berkely Sensor & Actuator Centre,University of California, USA

Questions and Discussion

12.15 Lunch
1.45 Session 3:
Market Predictions and Pathways of Potential Products to Commercial Production
Application in existing, products, new products, emerging technologies causing changes

Microsystems: Evaluation of the Word Market and Position of Europe
Mr. Jean-Christophe Eloy
YOLE Develpt Co, Franc

DARPA Microelectromechanical Systems (MEMS) Program
Dr. Al Pisano
MEMS Program Manager, DARPA, USA

MEMS/MST Market Analysis by NEXUS
Dr. Wechsung
Microparts GmbH, Germany

MEMS/MST Microactuator Opportunity for Magnetic Data Storage
Dr. Long-Sheng Fan
BM Corporation, USA

Questions and Discussion

3.15 Afternoon Tea Break
3.45 Session 4:
Global Problem Solutions
Environmental management, health, pollution, global warning

Prof. Wendong Zhang
Nth China Institute of Technology, China

Healthcare in the Future
Dr. Toshiro Shimoyama
Chairman & CEO, Olympus Optical Co Ltd, Japan

Application of Microtechnology in Implantable Devices
Mr. Markus Hailer
Medtronic Europe SA, Switzerland

Questions and Discussion

5.10 Open Discussion Period for the day
5.30 Adjourn for the day
Bus Departs RMIT for Hyatt
7.30 Summit Dinner
Red Ochre Grill
37-41 Little Bourke St
10.30 Return to Hyatt

Friday May 1

8.30 Bus Departs Hyatt for RMIT
9.00 Session 5:
Scenarios for Building the Micromachine Industry and New Manufacturing Technologies

Research/Industry links, access to manufacturing facilities, manufacturing technologies, standardization strategy

Micromachined Spinnerets for Micro Fibre
Dr. Yao Cheng
Assoc Research Scientist
Synchrotron Radiation Research Centre, Taiwan

Facility Head, Appleton Laboratory, CLRC, UK
Development of Infrastructure for Microsystem Engineering in Australia
Dr. Mike Murray
Corporate Executive, CSIRO, Australia

Standardization Workshop Report
Mr. Takayuki Hirano
Executive Director, Micromachine Center, Japan

Questions and Discussion

10.30 Morning Tea Break
11.00 Session 6:
Micromachine Education and Research Initiatives
Industry, university, pre university education to meet future needs

Transfer of Micromachine Technology to Industry
Mr. Philippe Fischer, FSSRM, Switzerland

Micromachine Education and Research - Working across Discipline Barriers
Prof. Jan-Ake Schweitz
Angstrom Laboratory, Scandinavia

Questions and Discussion
12.00 Lunch

Meeting of the Chief Delegates
Seminar Rooms l&2, Level 7, Storey Hall

1.30 Session 7:
Applications to Improve Daily Life Style
Leisure, Sport, Entertainment, Tops

Future Lifestyle and Micromachines
Mr. Takayuki Hirano
Executive Director, Micromachine Center, Japan

Alleviation of Profound Deafness
Prof. Graeme Clark, Director
Bionic Ear Institute, Australia

School Children's Ideas for Micromachines
Dr. Tsuneo Ishimaru
Chairman, Denso Corporation, Japan

Some Australian Primary and Secondary
School Children Imagining the Future with Micromachines
Professor Ian Bates, Associate Dean R&D RMIT University

Questions and Discussion

2.45 Open Discussion Period for the day and Review of Summit Outcomes
3.10 Conclusion of the Summit
3.15 Afternoon Tea Break
3.45 Bus Departs RMIT for Hyatt
4.15 Dinner and Blood on the Cross
Bus Departs Hyatt for Ballarat

Saturday May 2

9.00am Great Ocean Road Visit
Bus departs Hyatt
9.30pm Bus Return Hyatt



  • Professor Ian Bates
    Associate Dean, Research & Development RMIT University Faculty of Engineering
  • Dr. Ron Zmood
    Dept of Electrical Engineering RMIT University
  • Dr. Mike Murray
    Corporate Executive CSIRO
  • Mr. Peter Hayes
    Group Leader Electronics Robert Bosch (Australia) Pry Ltd
  • Professor Graeme Clark
    Director, Bionic Ear Institute


  • Dr. Albert van den Berg
    MESA Research Inst University of Twente
  • Dr. Lou Hermans
  • Dr. Henk Leeuwis


  • Mr. Gordon Guild, President,
    MTC Micromachining Technology Centre Simon Fraser University
  • Dr. Peter Dawson, Director General
    NRC Inst for Microstruc Science


  • Prof. Zhaoying Zhou, Chairman
    Dept of Precision lnstruments & Mechanology
    Tsinghua University Bejing, China
  • Prof. Wendong Zhang
    Dept of Instruments & Measurement Tec Nth China Inst of Technology
  • Prof. Defu Li
    Chinese Soc of Inertial Tech Bejing, Chaina
  • Mr. Guoying Cao
    SSTCC Bejing, Chaina


  • Prof. Daniel Handen
    Director LPMO-CNRS
  • Mr. Jean-Christophe Eloy
    YOLE Develpt Co


  • Prof. Wolfgang Menz
    Institut fuer Mikrosystemchnik Universitaetsgelaande Flugplatz
  • Dr. Bernhard Thomas
    Daimler Benz
    Forschungsinstitut Frankfurt Germany
  • Dr. Reiner Wechsung
    Microparts GmbH
  • Mr. Juergen Berger
    VDI/VDE Technologie, Zentrum Informations Technik GMBH


  • Prof. Paolo Dario
    Scuola Superiore Sant' Anna ARTS/MITECH labs
  • Mr. Leonello Dori
    CNK-lst Lamel Via P Gobetti


  • Prof. Naomasa Nakajima
    Dean Div of Eng, Graduate School University of Tokyo
  • Mr. Takayuki Hirano,
    Executive Director Micromachine Center
  • Dr. Tsuneo Ishimaru,
    Chairman Denso Corporation
  • Dr. Sadao Moritomo,
    President & CEO Seiko Seiki Co Ltd
  • Dr. Toshiro Shimoyama,
    Chairman & CEO Olympus Optical Co Ltd


  • Prof. Jan-Ake Schweitz
    The Angstrom Laboratory Uppsala University
  • Mr. Terje Kvisteroy,
    Technical Director SensoNor asa
  • Mr. Francois Grey, Vice Director
    Microelectronics Centre,
  • Prof. Ari Lehto, Research Professor
    VTT Electronics/Microelectronics


  • Prof. Nico de Rooij
    Institute of Microtechnology University of Neuchatel
  • Mr. Philippe Fischer
    FSSRM, Swiss Foundation of Research Microtechnology
  • Dr. Volker Gass
    Mecanex SA
  • Mr. Markus Haller
    Medtronic Europe SA


  • Dr. Minh-Shyong Lin
    Executive Vice-President Industrial Technology Research Institute
  • Mr. Yao Cheng,
    Associate Research Scientist Synchrotron Radiation Research Centre
  • Prof. Jin-Shown Shie
    Institute of Electro-Optics National Chia Tung University
  • Prof. Star Ruey-Shing Huang
    Dept of Electrical Engineering National Tsing Hua University


  • Prof. Howard Dorey
    Dept of Elec & Electronic Eng Imperial College,
  • Dr. Malcolm Gower, Chairman
    Exitech Ltd
  • Prof. Geoff Beardmore,
    Micro Engineering Manager
    Major Defence Systems Smiths Industries Aerospace & Defence Systems Ltd
    Cheltenham, Bishop's Cleve, Cheltenham Gloucestershire,
  • Prof. Ron Lawes, Facility Head
    Appleton Laboratory, CLRC Chilton, Didcot
    Oxfordshire, UK


  • Prof. Richard Muller
    Director: Berkeley Sensor & Actuator Centre Editor in Chief IEEE/ASME/JMEMS
    University of California Dept of EECS
  • Dr. Albert (Al) Pisano
    MEMS Program Manager DARPA/ETO
  • Dr. Long-Sheng Fan
    IBM Corporation Almaden Research Centre


The result of the Summit is reported as follows
  1. With regard to standardization, an internation-al network with Japan as the core will be con-structed to promote standardization using the Internet, based on the results of the workshop held in Japan, and contact persons will be assigned from active countries/regions.
  2. The 1999 summit is to be held in Scotland, with the 2000 summit to be held in Japan, and it was proposed that the 2001 summit be held in the United States. The United States made clear their intent to review the matter in a pos-itive light. Other countries which wish to hold the summit include Germany and Denmark.
  3. Due to activities in Singapore becoming quite pronounced, Singapore will be added as a mem-ber at the next summit.
  4. The home page for the summit proposed by Japan shall be started on the Micromachine Center's web site. For the time being, this home page will display pasts programs, partici-pants, and chairman's summaries, in addition to plans for the staging of future summits. In this, the fourth summit, a common level of awareness of micromachines among the participat-ing countries/regions was notable, as was an awareness of the need for greater efforts to assure the development of micromachines into the 21st century.

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