Micromachine Summit >  8th  (2002)

8th Micromachine Summit

Apil 30 - may 3, 2002
Maastricht, The Netherlands

Organised jointly by
  - MESA+ Research Institute (Netherlands)
  - IMEC (Belgium)

Program (PDF file)


Chairman's summary

Proceedings Online
(Only for the participants, Password needed)



Ian Bates, Professor
Rmit University

Jason Chaffey
Rmit University


Kris Baert
IMEC Microsystems, Components & Pack.Division

Dirk Beernaert
European Commission Essential Inf. Society Techn. & Infrastr


Charles Peng
Science Division, Taipei Representative Office in belgium

Hocine Ziad
Alcatel Microelectronics Technology R&D


Dan Gale
Canadian Microelctronics Corporation

Thomas Jackman
National Research Council of Canada

David Klymyshyn, Professor
University of Saskatchewan Dept. of Electrical Engineering


Bingchu Cai, Professor
Shanghai Jiao Tong University

Henggao Ding, Professor
Chinese Society of Inertial Technology

Jinshan Wang
Chongqing MEMS Science &Techn. Co,ltd.

Xiaohao Wang, Ass.Prof.
Tsinghua University Dept. of Precision Instr. & Mechanology

Zuwu Yuan, Dr.
Chinese Society of Inertial Technology

Wendong Zhang, Professor
North China Institute of Technology

Zhaoying Zhou, Professor
Tsinghua University Micro/Nano Technology Research Center


Anders Larsen
Technical University of Denmark MIC


Sami Franssila, Dr.
Helsinki University of Technology Microelectronics Centre


Constant Axelrad

Emmanuel Bigler, Professor
ENSMM-Besancon-France LCEP

Jean Christophe Eloy
Yole Developpement

Gaitan Menozzi


Liang-Han Hsieh
ITRI Western Europe Office

Jan Korvink, Dr.
Albert Ludwig University Freiburg Inst. for Microsystem Technology


Shuki Yeshurun, Dr.
Nanopass Technologies Ltd.


Dario Paolo, Professor
Scuola Superiore Sant'Anna ARTS/Mitech Labs

Mario Zen, Dr.
Istituto Trentino Di Cultura-IRST Microsystem Division


Takayuki Hirano
Micromachine Center

Takashi Mihara, Dr.
OLYMPUS Optical Co. Ltd. Strategy dept./Corporate R & D Center

Kanju Miyamoto
Micromachine Center International Exchange dept.

Naomasa Nakajima, Profesor
The University of the Air

Ryo Ohta
OLYMPUS Optical Co. Ltd. Laboratry No.2/Corporate R & D Center

Toshiro Shimoyama
OLYMPUS Optical Co., Ltd.

Hiroya Terashima
FANUC Ltd. Basic Research Laboratory


Young-Ho Cho
, Professor
Digital Nanolocomotion Center Mechanical Engineering, KAIST

Tae Song Kim
Korea Institute of Science & Techn. Microsystem Research Scientist

Sukhan Lee
Samsung Advanced Inst. of Technology

Jong-Oh Park
, Dr.Ing
Intelligent Microsystem Center


Liv Furuberg
, Dr.
SINTEF/University of Oslo Dept. of Microsystems


Siak Lim, ass.Prof.
National University of Singapore Mechanical Engineering

Zhenfeng Wang
Gintic Institute of Manufacturing Tech. Div. of Precision Technology


Carles Cane, Dr.
Centro Nacional Microelectronica (CNM) Dept. of Microsystems


Peter Enoksson, Professor
Chalmers University of Technology Dept. of Microelectronics


Claude Clement
PreciMediX SA

Philippe Fischer
FSRM Swiss Foundation for Research In Microtechnology

Nico de Rooij, Professor
University of Neuchatel Institute of Microtechnology


Shuo Hung Chang
, Professor
National Taiwan University Dept. of Mechanical Engineering

Fei-Bin Hsiao, Professor
National Cheng Kung University Inst. of Aeronautics & Astronautics

Chih-Kung Lee, Professor
National Taiwan University Institute of Applied Mechanics

Lin Min-Shyong, Dr.
Asia Pacific Microsystems, Inc.

The Netherlands

Willem Berg, ir.
Innofonds Twente.b.v.

Albert van den Berg, Prof. dr. ir.
MESA+ Research Institute University of Twente

Wijnand Calseijde, Ir.
Twinning Investment Management

Kees Eijkel
MESA+ Research Institute University of Twente

Paul Gennissen
Texas Instruments Holland

Jans Kruise, Dr.ir.
Texas Instruments Holland

Henk Leeuwis, Ir.
Lionix BV

Regina Luttge
MESA+ Research Institute University of Twente

Tim Markus, Drs.
Provincie Overijssel

Lina Sarro, Professor
Delft Unversity of Technology DIMES

Wolfgang Tostmann, Drs.
Ministry of Economic Affairs ICT Department

United Kingdom

David Allen
, Professor
Cranfield University SIMS

Geoff Beardmore, Professor

Ayman El Fatatry, Dr.
BAE SYSTEMS Adv. Techn. Centres

Ron Lawes, Professor
CCLRC-Rutherford Appleton Laboratory Engineering Department

Vishal Nayar, Dr.

Nadeem Rizvi, Dr.
Exitech Ltd. Oxford Insustrial Park

Deepak Uttamchandani, Professor
University of Strathclyde Dept. of Electronic & Electr.Engineering

United States of America

Raffaella Borzi, Ph.D.

Michael Gaitan
NIST MEMS Project, Semiconductor Elect.Div.

The 8th MICROMACHINE SUMMIT -- The dawn of maturity

  A common strand featured at this year's World Micromachine Summit: Nanotechnology. Almost all the presenters referred to the impact of, the fusion between and the implications of nanotechnology and microsystems on current and future applications.

  This remarkable change of emphasis could, possibly, become a milestone flagging the relative maturity of microtechnologies and the emergence of nanotechnology.

  The national/regional reports from across the world at this summit (The 8th held at Maastricht on the 1st and 2nd of May, 2002), provided updated accounts of programmes and developments since the last summit in 2001 at Freiburg.

  The review from the USA outlined examples of some of the relevant projects funded by the National Science Foundation (NSF), the Defense Advanced Research Projects Agency (DARPA) and the National Institute of Standards and Technology (NIST). The various programmes and projects, currently being supported by these three bodies, tend to have a biotechnology trend emphasising the shift towards nano-biotechnology in the USA. In this context, the NSF has sponsored the formation of a National Nanofabrication Users Network (NNUN). With regards to MEMS/Microsystems, a number of Industry Groups have been established to serve a similar purpose. The trend towards developing optical and RF MEMS remains strong in spite of the downturn of the IT/Telecom Industry.

  The situation in the UK was summarised as also shifting in interest towards nanotechnology although MEMS remained predominant for commercial exploitation as evidenced by the increasing number of spin-offs and SMEs.

  In Taiwan, the completion of the 6th year of the national MEMS programme was marked by the successful operation of the MEMS Common Laboratory at the Industrial Technology Research Institute (ITRI). MEMS is now deemed to be approaching maturity, prompting the National Science Council (NCS) of Taiwan to direct emphasis to nanotechnology through the (re)formation of the MEMS and Nanotechnology Advancement Team Program. Taiwan plans to invest approximately $600 million on nanotechnologies in the fields of micro-fuel cells, packaging and biotechnology. This programme of investment is scheduled to start the first quarter of 2003 and last until the year 2007.

  The review from Switzerland maintained a similar view with regards to the maturity of microtechnologies. This was demonstrated via "typically Swiss" commercial products such as wrist watches incorporating silcon-based, micromechanical, pressure sensors and cog wheels. New initiatives are planned to merge the fields of Nanotechnology and MST/MEMS.

  The situation in Singapore was reported to be less buoyant than was expected a year or so ago. The economic downturn, over the year, has, it was reported, led to a 20% cut in the funding made available for MEMS projects. None the less, a number of MEMS-based projects continue to be supported, including simulation and modelling work at the Institute of High Performance Computing amongst other institutions.

  The strong interest in biotechnology in the Nordic region of Europe has prompted the establishment of interdisciplinary research projects, collaborations and educational courses in addition to the ongoing programmes supporting microtechnologies. Norway, Finland, Sweden and Denmark all boast a fair number of new (or relatively new) start-ups offering either products or foundry services. In essence, commercialisation is taking its course.

  Mediterranean nations such as Spain, Greece and Italy reported a continuing effort in developing MST-based sensing systems in response to the industrial, agricultural and agroalimentary needs of these specific nations. A couple of new start-ups in Spain aiming to produce sensors for household appliances and food quality control were announced. In Greece, a newly established Network on Microsystems and Micro-Nanotechnology (MMN) was set up to promote the technology. In Italy, on the other hand, where microsystems technologies is well established, two new National Research programmes were launched in 2001, to address nanotechnologies and new materials as well as microsystems. Of note, in Italy, is the recent interest in developments relating to the electronic nose (e-nose) giving rise to 3 new start-up companies over the last year.

  The Korean national programme on microsystems continues to make progress as was outlined by the impressive results on developments of micro-biomedical diagnostic systems for endoscopic microcapsules. In parallel to this ambitious programme, the Korean government has launched a $1.4 billion programme on Nanotechnology (2001-2010). This national programme will address almost all aspects of nanotechnology which, along with Information Technology and Biotechnology forms one of the three most important technologies for the 21st Century identified by the Korean government.

  The 10 year long national "Micromachine" project in Japan was reported to have concluded its course successfully boasting the generation of over 500 patents and a number of commercial products as deliverables. Plans are, currently, being assessed for the launch of a national strategy for nanotechnology focussed on materials, processing, manufacturing and research.

   Activities in France continue to be underpinned by strong co-ordinating networks such as the French National Research Network in Micro and Nano-Technologies (RMNT) as well as the recently launched initiative for research and technology transfer, MINATEC, in Grenoble. MINATEC will provide education, training, research and facilities for high-tech industries aimed at supporting European Leadership in Micro and Nano-technologies. Finally, some "Colleges of Engineering" across France have begun to incorporate MEMS-related topics within their curricula. These topics include practical clean room processing and microfabrication techniques.

  MEMS/Microsystems developments in China were reported to have gained prominence following the results of a strategic study conducted by the Chinese Ministry of Science and Technology. The study identified micro-sensors, information-MEMS and bio-MEMS as priorities with emphasis on MEMS fabrication and nanotechnology. Within 2001, alone, 6 conferences on MEMS were held in China. This year, another 8 conferences are planned. The technology seems also to be enjoying international prominence through a number of reported collaborative ventures aimed at commercialising some of the developments undertaken by research and academic establishments in China.

  University research by Canadian Universities was reported to be advancing in the fields of MOEMS and RF MEMS amongst other, more general, mechanical designs. Industrial activities, on the other hand, appears to be gearing towards productionisation through the establishment of MEMS-specific fabrication lines and foundries. These facilities will capitalise on the, impressively, large number of designs (in excess of 180) fabricated by Canadian Institutes since 1997.

  The situation in Belgium and the Netherlands with regards to MEMS developments was also indicative of the maturity of this technology. Major players, spanning academia, institutions and companies are focusing efforts on specific applications in the fields of bio-analysis and telecommunications. National Nanotechnology programmes have also been initiated to help galvanise the research in this new field of research.

  Finally, the Australian government has focussed nationally-funded research onto four priority areas: (1) Nano and bio materials, (2) Genome/Phenome research, (3) Complex/Intelligent Systems and (4) Photon science and technology. Microsystems research has, as a result, been directed to address these specific areas. In this context, and underlying this programme, are plans for national facilities including the Bandwidth Foundry for Photonic ICs, a 110 meters diameter synchrotron, the MiniFAB fabrication facility and a national network for nanostructural analysis (NANO). Such facilities as well as the national focus will, it was reported, help Australian institutions and industry exploit new opportunities offered by Nano and Microtechnology.


  The national reports on the state-of-the-art of microtechnology could, it may be concluded, confirm that this technology is indeed nearing maturity. Details of the newly established nanotechnology initiatives helped only to corroborate this view amongst the (70 or so) delegates gathered in Maastricht. Commercialisation of MEMS-based devices is underway, particularly in the fields of bio-diagnostics. This continues to be enabled by national initiatives, programmes and facilities. The new focus on nanotechnology was proclaimed to be complementary to ongoing developments in microsystems, adding functionality and capabilities to systems and subsystems.

  Finally, this summit, organised jointly by the MESA+ Research Institute (Netherlands) and IMEC (Belgium), was considered by all attendees to have been a success and, probably, a milestone for Microsystems. Next year's summit, scheduled for Beijing, China on the 1st and 2nd of May 2003, will, it is hoped continue to report world-wide success of microtechnology commercialisation as well as advancements in nanotechnology research.

Ayman El Fatatry - BAE SYSTEMS
Kees Eijkel - MESA+ Research Institute
Albert van den Berg - MESA+ Research Institute (Summit Chairman)
Kris Baert - IMEC (Summit co-chair)

8 May, 2002

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