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| PROJECT OVERVIEW |
 G-Device@BEANS Project for Green Innovation |
| Toshihiro Itoh |
| Overview of G-device Project for Green Innovation at Center Kansai |
| Susumu Sugiyama |
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| ORAL SESSION |
| Green Operation on demand (GOOD) for clean room |
| K. Ando |
| Development of Wireless Smart Multisensor Devices for a Green World |
| Hiroshi Imamoto |
| MEMS Particle sensor for green operation on demand (GOOD) |
| H. Sven |
| Micro coil fabrication for ubiquitous power monitoring |
| Y. Zhang |
| Ultra Low Power Consumption IC for Green device |
| T Fujimori |
| Environment Friendly MEMS process |
| D. Dzung |
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| POSTER CONTRIBUTIONS |
| Wireless Smart Multi-sensor Devices |
| Hiroshi Imamoto |
| High sensitivity at high gas concentration gas sensor using porous SnO2 on trench substrate |
| Minoru Abasaki, Shinichi Souma, Nobuyuki Moronuki, Masakazu Sugiyama
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| Modeling of VB-FET Taking into Account Electro-Mechanical |
| Sinji Ueki, Yuki Nishimori, Hiroshi Imamoto and Gen Hashiguchi |
| Vibration-driven Electret Energy Harvester |
| K.Yamashita, M.Honzumi, and Y.Suzuki |
| VUV-based High-speed Electret Charging |
| M. Honzumi, K. Hagiwara, Y. Iguchi, and Y. Suzuki |
| Development of Piezoelectric Flow Sensor For Wake-up Switch |
| Yutaka Tomimatsu, Koichi Moriya, and Masataka Shinogi |
| Development of Pollution Gas Sensors for the Energy Saving in a Clean Room |
| Kyoji Shibuya, Dzung Viet Dao and Yutaka Yamagishi |
| Ferroelectric Thin Films for MEMS Sensors and Actuators |
| T. Matsushima and I. Kanno |
| RT: Real-time Position Tracking System |
| Ranjith Amarasinghe |
| Green 8 inch MEMS prototype station “TKB812” |
| G Device Center, BEANS Laboratory |
| Development of environment-friendly integration processes |
| Nobuaki Konno, Hideki Takagi, and Takashi Tokunaga |
| Development of Low GWP Emission Si Etching Process |
| -In-situ monitoring technique on DRIE process for high rate, high aspect
ratio etchiing- |
| Junji Ohara, Takuya Iwasaki |
| Sensor-net Plant Factory |
| Takanori Shimura |
| Selectively-Method to Evaluate the Influence of Surface Loss on Micro-Cantilever |
| Y. Nishimori, S. Ueki, T. Kubota and G. Hashiguchi |
| Process Deviation Check using a Scanning Multi-Probe Nano Lithography System |
| Y. Tomizawa, K. Suzuki, Y. Nishimori, Y. F. Li and G. Hashiguchi |
| Construction of a process platform for 8-inch MEMS prototyping |
| Toshio Sakamizu, Katsuyori Suzuki, Makoto saito, Toshibumi Uryu |
Development of evaluation methodology for fluctuation of characteristics
result
from fabrication variability |
Nobuyo Fujiwara, Kazuo Asaumi, Shunsuke Mochizuki, Noriyuki Ishihara, Katsuyori Suzuki,
Yuki Nishimori, Gen Hashiguchi |
| Smart fabrication system for MEMS by information sharing |
Naoki TANIMURA, Nobuyo FUJIWARA, Kazuo ASAUMI, Shoichi ISHIGAKI,
Hiromasa SUZUKI |
| Development of Eco-friendly Process Technology with Polymer |
| Masaaki Amikura, Dzung Viet DAO, Koichi Nakamura and Ryo Ota |
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