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PROJECT OVERVIEW |
G-Device@BEANS Project for Green Innovation |
Toshihiro Itoh ![](icon_pdf2.gif) |
Overview of G-device Project for Green Innovation at Center Kansai |
Susumu Sugiyama ![](icon_pdf2.gif) |
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ORAL SESSION |
Green Operation on demand (GOOD) for clean room |
K. Ando ![](icon_pdf2.gif) |
Development of Wireless Smart Multisensor Devices for a Green World |
Hiroshi Imamoto ![](icon_pdf2.gif) |
MEMS Particle sensor for green operation on demand (GOOD) |
H. Sven ![](icon_pdf2.gif) |
Micro coil fabrication for ubiquitous power monitoring |
Y. Zhang ![](icon_pdf2.gif) |
Ultra Low Power Consumption IC for Green device |
T Fujimori ![](icon_pdf2.gif) |
Environment Friendly MEMS process |
D. Dzung ![](icon_pdf2.gif) |
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POSTER CONTRIBUTIONS |
Wireless Smart Multi-sensor Devices |
Hiroshi Imamoto ![](icon_pdf2.gif) |
High sensitivity at high gas concentration gas sensor using porous SnO2 on trench substrate |
Minoru Abasaki, Shinichi Souma, Nobuyuki Moronuki, Masakazu Sugiyama
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Modeling of VB-FET Taking into Account Electro-Mechanical |
Sinji Ueki, Yuki Nishimori, Hiroshi Imamoto and Gen Hashiguchi ![](icon_pdf2.gif) |
Vibration-driven Electret Energy Harvester |
K.Yamashita, M.Honzumi, and Y.Suzuki ![](icon_pdf2.gif) |
VUV-based High-speed Electret Charging |
M. Honzumi, K. Hagiwara, Y. Iguchi, and Y. Suzuki ![](icon_pdf2.gif) |
Development of Piezoelectric Flow Sensor For Wake-up Switch |
Yutaka Tomimatsu, Koichi Moriya, and Masataka Shinogi ![](icon_pdf2.gif) |
Development of Pollution Gas Sensors for the Energy Saving in a Clean Room |
Kyoji Shibuya, Dzung Viet Dao and Yutaka Yamagishi ![](icon_pdf2.gif) |
Ferroelectric Thin Films for MEMS Sensors and Actuators |
T. Matsushima and I. Kanno ![](icon_pdf2.gif) |
RT: Real-time Position Tracking System |
Ranjith Amarasinghe ![](icon_pdf2.gif) |
Green 8 inch MEMS prototype station “TKB812” |
G Device Center, BEANS Laboratory ![](icon_pdf2.gif) |
Development of environment-friendly integration processes |
Nobuaki Konno, Hideki Takagi, and Takashi Tokunaga ![](icon_pdf2.gif) |
Development of Low GWP Emission Si Etching Process |
-In-situ monitoring technique on DRIE process for high rate, high aspect
ratio etchiing- |
Junji Ohara, Takuya Iwasaki ![](icon_pdf2.gif) |
Sensor-net Plant Factory |
Takanori Shimura ![](icon_pdf2.gif) |
Selectively-Method to Evaluate the Influence of Surface Loss on Micro-Cantilever |
Y. Nishimori, S. Ueki, T. Kubota and G. Hashiguchi ![](icon_pdf2.gif) |
Process Deviation Check using a Scanning Multi-Probe Nano Lithography System |
Y. Tomizawa, K. Suzuki, Y. Nishimori, Y. F. Li and G. Hashiguchi ![](icon_pdf2.gif) |
Construction of a process platform for 8-inch MEMS prototyping |
Toshio Sakamizu, Katsuyori Suzuki, Makoto saito, Toshibumi Uryu ![](icon_pdf2.gif) |
Development of evaluation methodology for fluctuation of characteristics
result
from fabrication variability |
Nobuyo Fujiwara, Kazuo Asaumi, Shunsuke Mochizuki, Noriyuki Ishihara, Katsuyori Suzuki,
Yuki Nishimori, Gen Hashiguchi ![](icon_pdf2.gif) |
Smart fabrication system for MEMS by information sharing |
Naoki TANIMURA, Nobuyo FUJIWARA, Kazuo ASAUMI, Shoichi ISHIGAKI,
Hiromasa SUZUKI ![](icon_pdf2.gif) |
Development of Eco-friendly Process Technology with Polymer |
Masaaki Amikura, Dzung Viet DAO, Koichi Nakamura and Ryo Ota ![](icon_pdf2.gif) |
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